Toroidal inductors in CMOS processes
Publikation/Tidskrift/Serie: 23rd NORCHIP Conference, 2005.
This paper presents a toroidal inductor integrated in a standard 0.13 /spl mu/m CMOS process. A very simple /spl Pi/ model for low frequencies is derived from 1-port and 2-port measurements, and a decent matching with general theory is observed. The coil exhibits an inductance of 1.1nH up to 20GHz (physical limit for the measurement equipment) and a quality factor approaching 10 at 15GHz. No self-resonance is observed within the measurement range.
- Technology and Engineering
21-22 Nov. 2005
- ISBN: 1-4244-0064-3