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Toroidal inductors in CMOS processes

  • Luca Vandi
  • Pietro Andreani
  • Enrico Temporiti
  • Enrico Sacchi
  • Ivan Bietti
  • Cesare Ghezzi
  • Rinaldo Castello
Publiceringsår: 2005
Språk: Engelska
Sidor: 293-296
Publikation/Tidskrift/Serie: 23rd NORCHIP Conference, 2005.
Dokumenttyp: Konferensbidrag


This paper presents a toroidal inductor integrated in a standard 0.13 /spl mu/m CMOS process. A very simple /spl Pi/ model for low frequencies is derived from 1-port and 2-port measurements, and a decent matching with general theory is observed. The coil exhibits an inductance of 1.1nH up to 20GHz (physical limit for the measurement equipment) and a quality factor approaching 10 at 15GHz. No self-resonance is observed within the measurement range.



  • Technology and Engineering


21-22 Nov. 2005
  • ISBN: 1-4244-0064-3

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