Si(100)2 × 1: the clean and ammonia exposed surface studied with high resolution core-level spectroscopy
Författare
Summary, in English
High resolution core-level spectroscopy was utilized to study the clean and NH3 exposed Si(100)2×1 surface. The clean surface exhibits two approximately equal intensity surface core-level components at −0.48 and 0.28 eV binding energy referred to the bulk component. NH3 exposure at 300 K induces two surface core-level components at 0.31 and 0.72 eV relative binding energy that can be assigned to surface Si atoms bonded to H and NH2, respectively. Alternative interpretations for the adsorption based on different interpretations of the clean surface core-level spectra are discussed. The steps between adsorption at 300 K and the beginning of subsurface silicon nitride formation by annealing the surface up to 1000 K are investigated.
Publiceringsår
1992
Språk
Engelska
Sidor
349-354
Publikation/Tidskrift/Serie
Surface Science
Volym
271
Issue
3
Dokumenttyp
Artikel i tidskrift
Förlag
Elsevier
Ämne
- Electrical Engineering, Electronic Engineering, Information Engineering
Status
Published
Forskningsgrupp
- Electromagnetic theory
ISBN/ISSN/Övrigt
- ISSN: 0039-6028