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Vertical InAs Nanowire Wrap Gate Transistors on Si Substrates

Författare:
Publiceringsår: 2008
Språk: Engelska
Sidor: 3037-3041
Publikation/Tidskrift/Serie: IEEE TRANSACTIONS ON ELECTRON DEVICES
Volym: 55
Nummer: 11
Dokumenttyp: Artikel
Förlag: IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC

Sammanfattning

We report on InAs enhancement-mode field-effect transistors integrated directly on Si substrates. The transistors consist of vertical InAs nanowires, grown on Si substrates without the use of metal seed particles, and they are processed with a 50-nm-long metal wrap gate and high-kappa gate dielectric. Device characteristics showing enhancement-mode operation are reported. The output characteristics are asymmetric due to the band alignment and band bending at the InAs/Si interface. The implemented transistor geometry can therefore also serve as a test structure for investigating the InAs/Si heterointerface. From temperature-dependent measurements, we deduce an activation energy of about 200 meV for the TnAs/Si conduction band offset.

Disputation

Nyckelord

  • Physics and Astronomy
  • nanowires (NWs)
  • Field-effect transistor (FET)
  • InAs
  • on Si
  • III-V
  • wrap gate

Övriga

Published
Yes
  • Nano
  • ISSN: 0018-9383

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