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InAs epitaxial lateral overgrowth of W masks

Författare:
Publiceringsår: 2005
Språk: Engelska
Sidor: 81-86
Publikation/Tidskrift/Serie: JOURNAL OF CRYSTAL GROWTH
Volym: 280
Nummer: 1-2
Dokumenttyp: Artikel
Förlag: ELSEVIER SCIENCE BV

Sammanfattning

The conditions for successful epitaxial lateral overgrowth of W patterns by InAs using low-pressure metalorganic vapour phase epitaxy were studied. The substrates used were InAs (0 0 1) wafers and the range of growth temperatures between 500 and 600 degrees C. The selective growth was investigated as a function of the V/III-ratio on W-ring test structures and wires oriented in different directions. 100-nm-wide wires, oriented in 30 degrees off from the [1 1 0]-direction, were completely covered with InAs without any void formation and the surface was planarized after deposition of 3 50 nm at the V/III-ratio of 14. Wires oriented along the [1 1 0]-direction were found to effectively block the lateral overgrowth by the formation of mesa ridges limited by {110} and {111} A-planes for V/III-ratios between 14 and 56. All other grating directions showed limited lateral growth. This observed orientation dependence is in general agreement with the overgrowth of GaAs, but shows differences compared to InP.

Disputation

Nyckelord

  • Physics and Astronomy
  • W/InAs
  • InAs
  • MOVPE
  • selective area growth
  • W/GaAs
  • W/InP

Övriga

Published
Yes
  • ISSN: 0022-0248

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