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Highly controlled InAs nanowires on Si(111) wafers by MOVPE

Publiceringsår: 2012
Språk: Engelska
Publikation/Tidskrift/Serie: Physica status solidi (c)
Volym: 9
Nummer: 2
Dokumenttyp: Konferensbidrag
Förlag: Wiley-Blackwell Publishing, Inc

Sammanfattning

We have investigated epitaxial growth of InAs layers on 2 '' Si (111) substrates by Metalorganic Vapor Phase Epitaxy. Structural and morphological characterization results confirm high quality of the obtained thin layers. Then, we have utilized the InAs layers as substrates for InAs nanowire growth and Au nanoparticles were lithographically defined at various positions on the surface. Statistical analysis performed on the InAs nanowires grown on 2 '' substrates demonstrates our full control on the position, diameter and vertical alignment across the wafer. One possible device application of the aforementioned structure is wrap-gated Metal-Oxide-Semiconductor Field-Effect Transistors where the InAs layer is employed as the bottom contact and the InAs nanowires act as channel materials. GRAPHICS SEM image of part of epitaxially grown InAs nanowires on the InAs layer on 2" Si substrate. The scale bar is 50 mu m. (C) 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim

Disputation

Nyckelord

  • Technology and Engineering
  • InAs
  • nanowire
  • MOSFET

Övriga

38th International Symposium on Compound Semiconductors (ISCS)/23rd International Conference on Indium Phosphide and Related Materials (IPRM)/Compound Semiconductor Week
2014-05-24
Berlin, Germany
Published
Yes
  • ISSN: 1862-6351

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