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SU-8 Cantilever for Bio/chemical Sensing; Fabrication, Characterisation and Development of Novel Read-out Methods

  • Maria Nordström (Dr)
  • Stephan Keller
  • Michael Lillemose
  • Alicia Johansson
  • Søren Dohn
  • Daniel Haefliger
  • Gabriela Blagoi
  • Mogens Havsteen-Jakobsen
  • Anja Boisen
Publiceringsår: 2008
Språk: Engelska
Sidor: 1595-1612
Publikation/Tidskrift/Serie: Sensors
Volym: 8
Nummer: 3
Dokumenttyp: Artikel
Förlag: MDPI
Ytterligare information: Invited Review Article


Here, we present the activities within our research group over the last five yearswith cantilevers fabricated in the polymer SU-8. We believe that SU-8 is an interestingpolymer for fabrication of cantilevers for bio/chemical sensing due to its simple processingand low Young’s modulus. We show examples of different integrated read-out methodsand their characterisation. We also show that SU-8 cantilevers have a reduced sensitivity tochanges in the environmental temperature and pH of the buffer solution. Moreover, weshow that the SU-8 cantilever surface can be functionalised directly with receptormolecules for analyte detection, thereby avoiding gold-thiol chemistry.



  • Technology and Engineering


  • ISSN: 1424-8220

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