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Dense high aspect ratio pillar arrays for carbon MEMS devices

Författare:
  • L. Amato
  • R.J. Hansen
  • A. Heiskanen
  • L. Gammelgard
  • T. Rindzevicius
  • R. Martinez-Duarte
  • G.S. Bisht
  • K. Baronian
  • A. Downard
  • Maria Tenje (Dr)
  • M. Madou
  • A. Boisen
  • Jenny Emnéus
  • S.S. Keller
Publiceringsår: 2012
Språk: Engelska
Dokumenttyp: Konferensbidrag

Sammanfattning

This work presents the fabrication and characterization of 3 dimensional electrodes from pyrolysed carbon with spacing and diameter approaching the resolution limit of standard UV photolithography. Our carbon pillar arrays have a diameter of 1.4 µm, spacing of 5 µm and aspect ratio of about 8. We show their characterization by a variety of techniques providing a complete summary of their electro-mechanical properties (Scanning Electron Microscopy, Raman spectroscopy, X-ray photoelectron spectroscopy, cyclic voltammetry, electrical measurements with microscopic four point probe). Considering its outstanding features, our high aspect ratio carbon MEMS electrode will be excellent for electrochemical biosensing.

Disputation

Nyckelord

  • Technology and Engineering

Övriga

38th International Conference on Micro and Nano Engineering (MNE 2012)
2012-09-16/2012-09-20
Toulouse, France
Published
Yes

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