Characterisation of SU-8 as a platform for cantilever sensors
Författare
Publiceringsår
2006
Språk
Engelska
Sidor
76-77
Dokumenttyp
Konferensbidrag
Ämne
- Medical Engineering
Conference name
1st International workshop on nanomechanical sensors
Conference date
2006-05-08 - 2006-05-12
Conference place
Copenhagen, Denmark
Status
Published