Nanoscale tungsten aerosol particles embedded in GaAs
Publikation/Tidskrift/Serie: Applied Physics Letters
Förlag: American Institute of Physics
GaAs containing buried nanoscale tungsten particles has been characterized electrically. The particles were produced using a special aerosol process and were embedded in GaAs by epitaxial overgrowth. Two different particle sizes were investigated separately. When the particle concentration was increased, a conductance drop of about 500 times was observed. A simulation model, based on a random distribution of the particles, was developed and used to support our findings. The major advantage of our method is the simplicity and low processing cost.
- Physics and Astronomy
- ISSN: 0003-6951