Diffusion barrier layer and method for manufacturing a diffusion barrier layer using PECVD technology
Other contributions
- Maryam Olsson
- H. Tran Quoc
- Alice Gallissian
Publiceringsår
2005
Språk
Engelska
Dokumenttyp
Patent
Ämne
- Other Engineering and Technologies not elsewhere specified
- Social Sciences Interdisciplinary
Status
Published