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Dense high aspect ratio pillar arrays for carbon MEMS devices

In English

Författare

  • L. Amato
  • R.J. Hansen
  • A. Heiskanen
  • L. Gammelgard
  • T. Rindzevicius
  • R. Martinez-Duarte
  • G.S. Bisht
  • K. Baronian
  • A. Downard
  • Maria Tenje
  • M. Madou
  • A. Boisen
  • Jenny Emnéus
  • S.S. Keller
Visa allt

Summary, in English

This work presents the fabrication and characterization of 3 dimensional electrodes from pyrolysed carbon with spacing and diameter approaching the resolution limit of standard UV photolithography. Our carbon pillar arrays have a diameter of 1.4 µm, spacing of 5 µm and aspect ratio of about 8. We show their characterization by a variety of techniques providing a complete summary of their electro-mechanical properties (Scanning Electron Microscopy, Raman spectroscopy, X-ray photoelectron spectroscopy, cyclic voltammetry, electrical measurements with microscopic four point probe). Considering its outstanding features, our high aspect ratio carbon MEMS electrode will be excellent for electrochemical biosensing.

Publiceringsår

2012

Språk

Engelska

Dokumenttyp

Konferensbidrag

Ämne

  • Analytical Chemistry
  • Medical Engineering

Conference name

38th International Conference on Micro and Nano Engineering (MNE 2012)

Conference date

2012-09-16 - 2012-09-20

Conference place

Toulouse, France

Status

Published