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Integrated optical readout for miniaturization of cantilever-based sensor system

In English

Författare

  • Maria Nordström
  • Dan A. Zauner
  • Montserrat Calleja
  • Jörg Hübner
  • Anja Boisen

Summary, in English

The authors present the fabrication and characterization of an integrated optical readout scheme based on single-mode waveguides for cantilever-based sensors. The cantilever bending is read out by monitoring changes in the optical intensity of light transmitted through the cantilever that also acts as a waveguide. The complete system is fabricated in the photosensitive polymer SU-8. They show theoretical calculations on the expected sensitivity both when operated in air and liquid and compare these with experimental characterization of the system in air where the cantilever is deflected mechanically. The experimental results compare well with the results obtained from the theoretical calculations.

Publiceringsår

2008

Språk

Engelska

Publikation/Tidskrift/Serie

Applied Physics Letters

Volym

91

Issue

10

Dokumenttyp

Artikel i tidskrift

Förlag

American Institute of Physics (AIP)

Ämne

  • Medical Engineering

Status

Published

ISBN/ISSN/Övrigt

  • ISSN: 0003-6951