Characterisation and comparison of a cMUT versus a piezoelectric transducer for air applications
Författare
Summary, in English
Avdelning/ar
Publiceringsår
2002
Språk
Engelska
Sidor
1023-1026
Publikation/Tidskrift/Serie
2002 IEEE Ultrasonics Symposium. Proceedings (Cat. No.02CH37388)
Dokumenttyp
Konferensbidrag
Förlag
IEEE - Institute of Electrical and Electronics Engineers Inc.
Ämne
- Medical Engineering
Nyckelord
- membrane thickness
- distance working range
- linearity plots
- SNR
- S/N ratio
- FFT spectra
- metallized polymeric membrane
- pyramid-shaped cavities
- Si backplate
- light diffraction tomography
- transducer radiation field
- capacitive micromachined US transducer
- air applications
- piezoelectric US transducer
- ultrasonic transducer comparison
- cavity size
- pressure maps
- bias voltage
- bandwidth
- 450 kHz
- Si
Conference name
IEEE Ultrasonics Symposium, 2002
Conference date
2002-10-08 - 2002-10-11
Conference place
Munich, Germany
Status
Published
ISBN/ISSN/Övrigt
- ISBN: 0-7803-7582-3