Webbläsaren som du använder stöds inte av denna webbplats. Alla versioner av Internet Explorer stöds inte längre, av oss eller Microsoft (läs mer här: * https://www.microsoft.com/en-us/microsoft-365/windows/end-of-ie-support).

Var god och använd en modern webbläsare för att ta del av denna webbplats, som t.ex. nyaste versioner av Edge, Chrome, Firefox eller Safari osv.

Characterisation and comparison of a cMUT versus a piezoelectric transducer for air applications

Författare

Summary, in English

The main objectives with this investigation are firstly to compare important parameters of a capacitive micromachined ultrasonic transducer (cMUT) for air applications with a corresponding piezoelectric ultrasonic transducer. Secondly, to characterise the cMUT's radiation field using light diffraction tomography. The cMUTs consist of a silicon backplate with small pyramid-shaped cavities and a metallised polymeric membrane. The piezoelectric transducers are nonfocused with a resonance frequency of 450 kHz. Time waveforms, FFT-spectra, S/N-ratio, linearity plots and distance working range are presented for different kinds of combinations of cavity size, membrane thickness and bias voltage. Pressure maps from light diffraction tomography measurements are also presented. The principal conclusions are that the cMUTs have comparable linearity and sensitivity but exhibit superior bandwidth to the compared piezoelectric transducers

Publiceringsår

2002

Språk

Engelska

Sidor

1023-1026

Publikation/Tidskrift/Serie

2002 IEEE Ultrasonics Symposium. Proceedings (Cat. No.02CH37388)

Dokumenttyp

Konferensbidrag

Förlag

IEEE - Institute of Electrical and Electronics Engineers Inc.

Ämne

  • Medical Engineering

Nyckelord

  • membrane thickness
  • distance working range
  • linearity plots
  • SNR
  • S/N ratio
  • FFT spectra
  • metallized polymeric membrane
  • pyramid-shaped cavities
  • Si backplate
  • light diffraction tomography
  • transducer radiation field
  • capacitive micromachined US transducer
  • air applications
  • piezoelectric US transducer
  • ultrasonic transducer comparison
  • cavity size
  • pressure maps
  • bias voltage
  • bandwidth
  • 450 kHz
  • Si

Conference name

IEEE Ultrasonics Symposium, 2002

Conference date

2002-10-08 - 2002-10-11

Conference place

Munich, Germany

Status

Published

ISBN/ISSN/Övrigt

  • ISBN: 0-7803-7582-3