Quantative photoelectron spectromicroscopy for investigation of PMMA resist residues
Författare
Summary, in English
Avdelning/ar
Publiceringsår
2002
Språk
Engelska
Publikation/Tidskrift/Serie
7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science
Dokumenttyp
Konferensbidrag
Förlag
Lund University
Ämne
- Natural Sciences
- Condensed Matter Physics
- Physical Sciences
Nyckelord
- Si2p photoelectrons
- film thickness
- SiO<sub>2</sub> valence band
- electron beam exposure
- SiO<sub>2</sub> surfaces
- surface sensitivity
- photoelectron spectromicroscopy
- PMMA resist residues
- attenuation
- electronic devices technology
- 0.7 nm
- 0.5 nm
- SiO<sub>2</sub>-Si
- SiO<sub>2</sub>
Conference name
Proceedings of 7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science (NANO-7/ECOSS-21)
Conference date
2002-06-24 - 2002-06-28
Conference place
Malmö, Sweden
Status
Published