High-rate dual-target dc magnetron sputtering of "blue" electromagnetic Mo oxide

Summary, in English

Mo oxide films were prepared by dual-target reactive DC magnetron sputtering under conditions leading to films that were blue in as-deposited state. The deposition rate for this “blue” Mo oxide was as high as 1.5 nm/s, to be compared to ∼0.85 and ∼0.1 nm/s for highly transparent Mo oxide films made with dual-target and single-target sputtering, respectively. Good electrochromic properties of the “blue” films evolved after ∼5 colour/bleach cycles in a Li+ conducting electrolyte.

• Författare: Maryam Olsson; Lisen Kullman; Claes Göran Granqvist
• Publiceringsår: 1998
• Språk: Engelska
• Sidor: 349-356
• Publikation/Tidskrift/Serie: Solar Energy Materials and Solar Cells
• Volym: 53
• Issue: 3-4
• Länkar: http://dx.doi.org/10.1016/S0927-0248(98)00033-6
• Dokumenttyp: Artikel i tidskrift
• Förlag: Elsevier
• Ämne: Social Sciences Interdisciplinary; Other Engineering and Technologies not elsewhere specified
• Nyckelord: Thin films; Sputter deposition; Molybdenum oxide; Smart windows
• Status: Published
• ISBN/ISSN/Övrigt: ISSN: 0927-0248