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Fabrication of micro-mechanical sensors with the polymer SU-8

Författare:
  • S. Keller
  • Maria Tenje
  • N. Noeth
  • S. Dohn
  • G. Blagoi
  • D. Haefliger
  • A. Boisen
Publiceringsår: 2009
Språk: Engelska
Dokumenttyp: Konferensbidrag

Sammanfattning

In this paper, we present the design and fabrication of biosensors based on SU-8 cantilevers with a thickness ≤ 5μm. The processing of the polymer was optimized to reduce initial bending of the devices which is essential for optical read-out of the cantilever deflection. Solvent absorption in the SU-8 had to be minimized to reduce drift of the cantilever bending during measurements in liquid. The shelf-life of the sensors was improved to enable storage for several months. Further, we introduced methods for process integrated metallization, backside passivation and surface functionalization allowing the fabrication of a variety of cantilever-based sensors.

Nyckelord

  • Medical Engineering

Övriga

Eurosensors XXIII
Published

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