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Characterisation and comparison of a cMUT versus a piezoelectric transducer for air applications

Publiceringsår: 2002
Språk: Engelska
Sidor: 1023-1026
Publikation/Tidskrift/Serie: 2002 IEEE Ultrasonics Symposium. Proceedings (Cat. No.02CH37388)
Dokumenttyp: Konferensbidrag
Förlag: IEEE--Institute of Electrical and Electronics Engineers Inc.


The main objectives with this investigation are firstly to compare important parameters of a capacitive micromachined ultrasonic transducer (cMUT) for air applications with a corresponding piezoelectric ultrasonic transducer. Secondly, to characterise the cMUT's radiation field using light diffraction tomography. The cMUTs consist of a silicon backplate with small pyramid-shaped cavities and a metallised polymeric membrane. The piezoelectric transducers are nonfocused with a resonance frequency of 450 kHz. Time waveforms, FFT-spectra, S/N-ratio, linearity plots and distance working range are presented for different kinds of combinations of cavity size, membrane thickness and bias voltage. Pressure maps from light diffraction tomography measurements are also presented. The principal conclusions are that the cMUTs have comparable linearity and sensitivity but exhibit superior bandwidth to the compared piezoelectric transducers


  • Medical Engineering
  • membrane thickness
  • distance working range
  • linearity plots
  • SNR
  • S/N ratio
  • FFT spectra
  • metallized polymeric membrane
  • pyramid-shaped cavities
  • Si backplate
  • light diffraction tomography
  • transducer radiation field
  • capacitive micromachined US transducer
  • air applications
  • piezoelectric US transducer
  • ultrasonic transducer comparison
  • cavity size
  • pressure maps
  • bias voltage
  • bandwidth
  • 450 kHz
  • Si


IEEE Ultrasonics Symposium, 2002
  • ISBN: 0-7803-7582-3

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