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High-performance 15 nm diameter InAs nanowire Ω-gate MOSFETs

Publiceringsår: 2012
Språk: Engelska
Dokumenttyp: Konferensbidrag


In this paper we present 15 nm InAs nanowire lateral

MOSFETs with an Ω-gate. The nanowires are grown from

size-selected Au-aerosols by means of metal-organic vapor

phase epixtaxy (MOVPE). In order to reduce the source and

drain resistances, n-type dopants were introduced in the bottom

and top parts of the nanowire forming a n-i-n structure. We

report experimental data for 15 nm InAs nanowire MOSFETs,

LG = 150 nm, with a normalized transconducatance gm =

0.7 S/mm (normalized to the circumference) and a current

density Je = 24 MA/cm, comparable to modern high electron

mobility transistors (HEMTs)


  • Electrical Engineering, Electronic Engineering, Information Engineering
  • Condensed Matter Physics
  • high-performance
  • InAs
  • drive current
  • transconductance


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