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Design and Modeling of a High-Speed AFM-Scanner

  • Georg Schitter
  • Karl Johan Åström
  • Barry E. DeMartini
  • Philipp J. Thurner
  • Kimberly L. Turner
  • Paul K. Hansma
Publiceringsår: 2007
Språk: Engelska
Sidor: 906-915
Publikation/Tidskrift/Serie: IEEE Transactions on Control Systems Technology
Volym: 15
Nummer: 5
Dokumenttyp: Artikel i tidskrift
Förlag: IEEE--Institute of Electrical and Electronics Engineers Inc.


A new mechanical scanner design for a high-speed atomic force microscope (AFM) is presented and discussed in terms of modeling and control. The positioning range of this scanner is 13 mum in the X- and Y-directions and 4.3 mum in the vertical direction. The lowest resonance frequency of this scanner is above 22 kHz. This paper is focused on the vertical direction of the scanner, being the crucial axis of motion with the highest precision and bandwidth requirements for gentle imaging with the AFM. A second- and a fourth-order mathematical model of the scanner are derived that allow new insights into important design parameters. Proportional-integral (Pl)-feedback control of the high-speed scanner is discussed and the performance of the new AFM is demonstrated by imaging a calibration grating and a biological sample at 8 frames/s.


  • Control Engineering
  • Atomic force microscopy
  • fast scanning
  • mechatronics
  • nanotechnology
  • precision positioning
  • real time imaging


  • ISSN: 1558-0865

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