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Miniaturized flowthrough microdispenser with piezoceramic tripod actuation

Publiceringsår: 2005
Språk: Engelska
Sidor: 134-140
Publikation/Tidskrift/Serie: Journal of Microelectromechanical Systems
Volym: 14
Nummer: 1
Dokumenttyp: Artikel i tidskrift
Förlag: IEEE--Institute of Electrical and Electronics Engineers Inc.


In this paper, the further development of a silicon flowthrough microdispenser is described. Previously reported designs of the dispenser used bimorph, and later multilayered, piezoelectric actuator elements for the generation of droplets. The introduction of a multilayered actuator significantly reduced the voltage amplitude needed to dispense droplets. Dispenser properties relevant for chemical analysis systems, e.g., reduced sample volume, internal surface area, and dispersion, were improved by miniaturization of the device. In this paper, a new actuator design, the tripod, is presented to enable further dispenser miniaturization and to facilitate device assembly. Tripod actuators were manufactured using a prototyping process, based on micromilling, for multilayer piezoceramic components. A building technique for miniaturized electrical interconnects, based on microstructured flexible printed circuits, is also suggested in line with the prospect of future miniaturization. The microfluidic properties of the tripod- actuated dispenser were evaluated. Stable droplet generation in the frequency range from 0 to 3 kHz was demonstrated, providing a maximum dispensed flow rate of 7.8 muL/min.


  • Medical Engineering
  • lead zirconate
  • piezoactuator
  • miniaturization
  • dispenser
  • droplet
  • titanate (PZT)


  • ISSN: 1057-7157

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