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Dense high aspect ratio pillar arrays for carbon MEMS devices

  • L. Amato
  • R.J. Hansen
  • A. Heiskanen
  • L. Gammelgard
  • T. Rindzevicius
  • R. Martinez-Duarte
  • G.S. Bisht
  • K. Baronian
  • A. Downard
  • Maria Tenje
  • M. Madou
  • A. Boisen
  • Jenny Emnéus
  • S.S. Keller
Publiceringsår: 2012
Språk: Engelska
Dokumenttyp: Konferensbidrag


This work presents the fabrication and characterization of 3 dimensional electrodes from pyrolysed carbon with spacing and diameter approaching the resolution limit of standard UV photolithography. Our carbon pillar arrays have a diameter of 1.4 µm, spacing of 5 µm and aspect ratio of about 8. We show their characterization by a variety of techniques providing a complete summary of their electro-mechanical properties (Scanning Electron Microscopy, Raman spectroscopy, X-ray photoelectron spectroscopy, cyclic voltammetry, electrical measurements with microscopic four point probe). Considering its outstanding features, our high aspect ratio carbon MEMS electrode will be excellent for electrochemical biosensing.


  • Analytical Chemistry
  • Medical Engineering


38th International Conference on Micro and Nano Engineering (MNE 2012)

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