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Nanoscale tungsten aerosol particles embedded in GaAs

Publiceringsår: 2002
Språk: Engelska
Sidor: 2976-2978
Publikation/Tidskrift/Serie: Applied Physics Letters
Volym: 80
Nummer: 16
Dokumenttyp: Artikel i tidskrift
Förlag: American Institute of Physics


GaAs containing buried nanoscale tungsten particles has been characterized electrically. The particles were produced using a special aerosol process and were embedded in GaAs by epitaxial overgrowth. Two different particle sizes were investigated separately. When the particle concentration was increased, a conductance drop of about 500 times was observed. A simulation model, based on a random distribution of the particles, was developed and used to support our findings. The major advantage of our method is the simplicity and low processing cost.


  • Electrical Engineering, Electronic Engineering, Information Engineering
  • Condensed Matter Physics


  • ISSN: 0003-6951

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