A 0.2V, 7.5 uW, 20 kHz Sigma-Delta modulator with 69 dB SNR in 90 nm CMOS

In English This paper presents a frequency-to-digital ΣΔ modulator designed in a digital 90 nm CMOS process, operating with a supply voltage of 0.2V. For a 7.5 μW power consumption, the SNR is 68.9 dB and the SNDR is 60.3 dB over a 20 Hz-20 kHz bandwidth. This work shows that the SNR/SNDR performance of this kind of ΣΔ converter can be adjusted over a wide range, while maintaining a state-of-the-art figure-of-merit of 82 fJ/conversion.