Du är här

A compact CMOS MEMS microphone with 66dB SNR

  • Jelena Citakovic
  • Per F. Høvesten
  • Gino Rocca
  • Aart van Halteren
  • Pirmin Rombach
  • Lars J. Stenberg
  • Pietro Andreani
  • Erik Bruun
Publiceringsår: 2009
Språk: Engelska
Sidor: 350-351
Volym: 52
Dokumenttyp: Konferensbidrag


A microphone system, comprising two differentially-operated MEMS microphones and a CMOS differential amplifier mounted on a common die substrate, has a very small volume of 2.6x3.2x0.865mm3, showing a record-high SNR of 66dB over the 20Hz-20kHz audio band. The system sensitivity is -33.5dB (Vrms/Pa), PSRR is above 55dB, and THD is below 1% for sound pressure levels below 112dB. The current consumption is 120μA from a 1.8V power supply.



  • Technology and Engineering
  • integrated
  • microphone
  • CMOS
  • MEMS


IEEE International Solid-State Circuits Conference (ISSCC)
San Francisco
  • Data converters & RF
  • ISSN: 0193-6530

Box 117, 221 00 LUND
Telefon 046-222 00 00 (växel)
Telefax 046-222 47 20
lu [at] lu [dot] se

LERU logotype U21 logotype

Fakturaadress: Box 188, 221 00 LUND
Organisationsnummer: 202100-3211
Om webbplatsen