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A compact CMOS MEMS microphone with 66dB SNR

Författare:
  • Jelena Citakovic
  • Per F. Høvesten
  • Gino Rocca
  • Aart van Halteren
  • Pirmin Rombach
  • Lars J. Stenberg
  • Pietro Andreani
  • Erik Bruun
Publiceringsår: 2009
Språk: Engelska
Sidor: 350-351
Volym: 52
Dokumenttyp: Konferensbidrag

Sammanfattning

A microphone system, comprising two differentially-operated MEMS microphones and a CMOS differential amplifier mounted on a common die substrate, has a very small volume of 2.6x3.2x0.865mm3, showing a record-high SNR of 66dB over the 20Hz-20kHz audio band. The system sensitivity is -33.5dB (Vrms/Pa), PSRR is above 55dB, and THD is below 1% for sound pressure levels below 112dB. The current consumption is 120μA from a 1.8V power supply.

Disputation

Nyckelord

  • Technology and Engineering
  • integrated
  • microphone
  • CMOS
  • MEMS

Övriga

IEEE International Solid-State Circuits Conference (ISSCC)
2009-02-08/2009-02-12
San Francisco
Published
Yes
  • Data converters & RF
  • ISSN: 0193-6530

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