Du är här

Characterization of micromachined ultrasonic transducers using light diffraction tomography

Författare:
Publiceringsår: 2005
Språk: Engelska
Sidor: 2298-2302
Publikation/Tidskrift/Serie: IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Volym: 52
Nummer: 12
Dokumenttyp: Artikel
Förlag: Institute of Electrical and Electronic Engineers

Sammanfattning

This paper demonstrates that light diffraction tomography can be used to measure the acoustic field of micromachined ultrasonic transducers (MUT) in cases in which standard methods like hydrophone and microphone measurements fail. Two types of MUTs have been characterized with the method, one air-coupled capacitive MUT (cMUT) and one waterloaded continuous wave (CW) miniature multilayer lead zirconate titanate (PZT) transducer. Light diffraction tomography is an ultrasound measurement method with some special characteristics. Based on the interaction of light and ultrasound, it combines light intensity measurements with tomography algorithms to produce a measurement system. The method offers nonperturbing pressure measurements with high spatial resolution. It has been shown that, under certain circumstances, light diffraction tomography can be used as an absolute pressure measurement method with accuracy in the order of 10% in water and 13% in air. The results show that air-coupled cMUTs in the frequency range of about 1 MHz as well as the extreme near field of a miniaturized CW 10 MHz waterloaded transducer were successfully characterized with light diffraction tomography.

Disputation

Nyckelord

  • Technology and Engineering

Övrigt

Published
Yes
  • ISSN: 0885-3010

Box 117, 221 00 LUND
Telefon 046-222 00 00 (växel)
Telefax 046-222 47 20
lu [at] lu [dot] se

Fakturaadress: Box 188, 221 00 LUND
Organisationsnummer: 202100-3211
Om webbplatsen

LERU logo U21 logo