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Nanowire arrays defined by nanoimprint lithography

Publiceringsår: 2004
Språk: Engelska
Sidor: 699-702
Publikation/Tidskrift/Serie: Nano Letters
Volym: 4
Nummer: 4
Dokumenttyp: Artikel
Förlag: American Chemical Society


We demonstrate the use of nanoimprint lithography to define arrays of vertical InP nanowires. Each nanowire is individually seeded from a catalyzing gold particle and then grown via vapor-liquid-solid growth in a metal-organic vapor phase epitaxy system. The diameter and position of each nanowire can be controlled to create engineered arrays, demonstrated with a hexagonal photonic crystal pattern. This combination of nanoimprint and self-assembly of nanostructures is attractive for photonics and electronics, as well as in life sciences.



  • Physics and Astronomy


  • ISSN: 1530-6984

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