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Drift study of SU8 cantilevers in liquid and gaseous environments

Publiceringsår: 2010
Språk: Engelska
Sidor: 596-598
Publikation/Tidskrift/Serie: Ultramicroscopy
Volym: 110
Nummer: 6
Dokumenttyp: Artikel
Förlag: Elsevier


We present a study of the drift, in terms of cantilever deflections without probe/target interactions, of polymeric SU8 cantilevers. The drift is measured in PBS buffer (pH 7.4) and under vacuum (1mbar) conditions. We see that the cantilevers display a large drift in both environments. We believe this is because the polymer matrix absorbs liquid in one situation whereas it is being degassed in the other. An inhomogeneous expansion/contraction of the cantilever is seen because one surface of the cantilever may still have remains of the release layer from the fabrication. To further study the effect, we coat the cantilevers with a hydrophobic coating, perfluorodecyltrichlorosilane (FDTS). Fully encapsulating the SU8 cantilever greatly reduces the drift in liquid whereas a less significant change is seen in vacuum.



  • Medical Engineering


  • ISSN: 0304-3991

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