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Cantilever-based sensor with integrated optical read-out using single mode waveguides

Publiceringsår: 2007
Språk: Engelska
Sidor: 497-499
Dokumenttyp: Konferensbidrag


This work presents the design, fabrication and mechanical characterisation of an integrated optical read-out scheme for cantilever-based biosensors. A cantilever can be used as a biosensor by monitoring its bending caused by the surface stress generated due to chemical reactions occurring on its surface. Here, we present a novel integrated optical read-out scheme based on single-mode waveguides that enables the fabrication of a compact system. The complete system is fabricated in the polymer SU-8. This manuscript shows the principle of operation and the design well as the fabrication of the system and characterisation of the read-out method.



  • Technology and Engineering


11th International Conference on Miniaturised Systems for Chemistry and Life Sciences (µTAS 2007)
Paris, France

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