Fabrication and characterisation of AFM probes in SU-8 using a dry release method
Författare
Publiceringsår
2006
Språk
Engelska
Sidor
50-51
Dokumenttyp
Konferensbidrag
Ämne
- Medical Engineering
Conference name
1st International workshop on nanomechanical sensors
Conference date
2006-05-08 - 2006-05-12
Conference place
Copenhagen, Denmark
Status
Published