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Sulfur passivation for ohmic contact formation to InAs nanowires

Publiceringsår: 2007
Språk: Engelska
Sidor:
Publikation/Tidskrift/Serie: NANOTECHNOLOGY
Volym: 18
Nummer: 10
Dokumenttyp: Artikel
Förlag: IOP PUBLISHING LTD

Sammanfattning

We have studied the formation of ohmic contacts to InAs nanowires by chemical etching and passivation of the contact areas in an ammonium polysulfide, (NH4)(2)S-x, water solution. The nanowires were exposed to different dilution levels of the (NH4)(2)Sx solution before contact metal evaporation. A process based on a highly diluted ( NH4)S-2(x) solution was found to be self-terminating, with minimal etching of the InAs. The stability of the contacts was investigated with electrical measurements as a function of storage time in vacuum and air.

Disputation

Nyckelord

  • Physics and Astronomy

Övriga

Published
Yes
  • ISSN: 0957-4484

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