Integrated optical readout for miniaturization of cantilever-based sensor system
Författare
Summary, in English
The authors present the fabrication and characterization of an integrated optical readout scheme based on single-mode waveguides for cantilever-based sensors. The cantilever bending is read out by monitoring changes in the optical intensity of light transmitted through the cantilever that also acts as a waveguide. The complete system is fabricated in the photosensitive polymer SU-8. They show theoretical calculations on the expected sensitivity both when operated in air and liquid and compare these with experimental characterization of the system in air where the cantilever is deflected mechanically. The experimental results compare well with the results obtained from the theoretical calculations.
Publiceringsår
2008
Språk
Engelska
Publikation/Tidskrift/Serie
Applied Physics Letters
Volym
91
Issue
10
Dokumenttyp
Artikel i tidskrift
Förlag
American Institute of Physics (AIP)
Ämne
- Medical Engineering
Status
Published
ISBN/ISSN/Övrigt
- ISSN: 0003-6951