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Investigation of the bond strength between the photo-sensitive polymer SU-8 and gold

In English

Författare

  • Maria Nordström
  • Alicia Johansson
  • Encarnacion Sánchez Noguerón
  • Bjarne Clausen
  • Montserrat Calleja
  • Anja Boisen

Summary, in English

We present the results from a thorough investigation of the bond strength between the photo-polymer SU-8 and Au. The data were obtained by pull-test experiments, below the glass transition temperature of the polymer. The different aspects that we investigated were: (i) the effect of using different adhesion promoters between the SU-8 and Au; (ii) the influence of the processing sequence, keeping either Au or SU-8 as the bottom layer; (iii) the importance of the UV exposure dosage of the SU-8. For comparison, also the bond strength between SU-8 and other materials was measured. For SU-8 and Au without any adhesion promoter we find a bond strength of 4.8 ± 1.2 MPa for a 7.5-μm-layer of SU-8. The value of the bond strength can be increased additionally by up to 75% using an adhesion promoter and fully optimising the processing conditions of the SU-8.

Publiceringsår

2005

Språk

Engelska

Sidor

152-157

Publikation/Tidskrift/Serie

Microelectronic Engineering

Volym

78/79

Dokumenttyp

Artikel i tidskrift

Förlag

Elsevier

Ämne

  • Medical Engineering

Status

Published

ISBN/ISSN/Övrigt

  • ISSN: 1873-5568