Electron-Beam Patterning of Polymer Electrolyte Films To Make Multiple Nanoscale Gates for Nanowire Transistors
Författare
Summary, in English
We report an electron-beam based method for the nanoscale patterning of the poly(ethylene oxide)/LiClO4 polymer electrolyte. We use the patterned polymer electrolyte as a high capacitance gate dielectric in single nanowire transistors and obtain subthreshold swings comparable to conventional metal/oxide wrap-gated nanowire transistors. Patterning eliminates gate/contact overlap, which reduces parasitic effects and enables multiple, independently controllable gates. The method's simplicity broadens the scope for using polymer electrolyte gating in studies of nanowires and other nanoscale devices.
Avdelning/ar
Publiceringsår
2014
Språk
Engelska
Sidor
94-100
Publikation/Tidskrift/Serie
Nano Letters
Volym
14
Issue
1
Dokumenttyp
Artikel i tidskrift
Förlag
The American Chemical Society (ACS)
Ämne
- Nano Technology
Nyckelord
- III-V nanowires
- polymer electrolytes
- electron beam lithography
- nanoelectronics
Status
Published
Forskningsgrupp
- Nanometer structure consortium (nmC)
ISBN/ISSN/Övrigt
- ISSN: 1530-6992